Moving data (media) to new server

I'm moving to new hardware, but I need help with my plan.

I want complete new unraid setup with my server, I don't copy any setting etc from old server. But I want to move all data (media) to new server.

Current server

Array 21.2 TB used of 24 TB (88.3 %)

16TB HDD (parity)

16TB HDD (disk1)

4TB HDD (disk2)

4TB HDD (disk3)

New server

I only have one new 16TB HDD, but I want to save all old data. My current plan is to remove parity disk from old server and create new  array to new server.

Parity: 16TB HDD (new)

disk 1: 16 TB HDD (old parity)

After that the plan is to move disk2/3 data from the old server to the new array. After that I will move disk2/3 to new server.

Parity: 16TB HDD (new)

disk 1: 16TB HDD (old parity)

disk 2: 4TB HDD (old disk2)

disk 3: 4TB HDD (old disk3)

After that the plan is to move disk1 data from the old server to the new array. After that I move the last HDD to the new server.

Array

Parity: 16TB HDD (new)

disk 1: 16TB HDD (old parity)

disk 2: 4TB HDD (old disk2)

disk 3: 4TB HDD (old disk3)

disk 4: 16TB HDD (old disk1)

Is this ok array? What is the best way to move the data via LAN? My current array uses XFS, but btrfs is the way to go?

I have one extra nvme 1TB SSD and sata 1TB SSD. Does unraid still benefit from cache disk? (cache pool)