As Jon has said - there are a lot of ways to do this.
However I'd like to say what I did and how I did it. This was going from 1.5 tb drives to 3tb drives - so it's old info, take it with a grain of salt (and it's been like 6 years)
New server, new drives. Ran PreClear on all new drives. 3x Read/Write - basically ensuring the new drives are good.
I then did a unraid format / import on all disks.
Once all disks passed that I then inserted one of the old disks at a time, copying them to whichever drive I wanted. I did this via SSH/Telnet via MidnightCommander.
After all disks (in my case it was 8) I did a rebuild array. (which IIRC rebuilds parity based on the data disks info)
I have since added a 2nd parity drive - and all seems well.
YMMV - but that's what I did.
And a side note - get another drive for dual parity. It's well worth it.
One thing to keep in mind - if you do it this way all of your data is unprotected until it's finished - it's dangerous.